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MEMS Accelerometers

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ISBN: 9783038974147 9783038974154 Year: Pages: 252 DOI: 10.3390/books978-3-03897-415-4 Language: English
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-06-26 08:44:06
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Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc.

Keywords

low-temperature co-fired ceramic (LTCC) --- capacitive accelerometer --- wireless --- process optimization --- performance characterization --- MEMS accelerometer --- mismatch of parasitic capacitance --- electrostatic stiffness --- high acceleration sensor --- piezoresistive effect --- MEMS --- micro machining --- turbulent kinetic energy dissipation rate --- probe --- microelectromechanical systems (MEMS) piezoresistive sensor chip --- Taguchi method --- marine environmental monitoring --- accelerometer --- frequency --- acceleration --- heat convection --- motion analysis --- auto-encoder --- dance classification --- deep learning --- self-coaching --- wavelet packet --- classification of horse gaits --- MEMS sensors --- gait analysis --- rehabilitation assessment --- body sensor network --- MEMS accelerometer --- electromechanical delta-sigma --- built-in self-test --- in situ self-testing --- digital resonator --- accelerometer --- activity monitoring --- regularity of activity --- sleep time duration detection --- indoor positioning --- WiFi-RSSI radio map --- MEMS-IMU accelerometer --- zero-velocity update --- step detection --- stride length estimation --- field emission --- hybrid integrated --- vacuum microelectronic --- cathode tips array --- interface ASIC --- micro-electro-mechanical systems (MEMS) --- delaying mechanism --- safety and arming system --- accelerometer --- multi-axis sensing --- capacitive transduction --- inertial sensors --- three-axis accelerometer --- micromachining --- miniaturization --- stereo visual-inertial odometry --- fault tolerant --- hostile environment --- MEMS-IMU --- mode splitting --- Kerr noise --- angular-rate sensing --- whispering-gallery-mode --- optical microresonator --- three-axis acceleration sensor --- MEMS technology --- sensitivity --- L-shaped beam --- n/a

MEMS/NEMS Sensors: Fabrication and Application

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ISBN: 9783039216345 9783039216352 Year: Pages: 242 DOI: 10.3390/books978-3-03921-635-2 Language: English
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-12-09 16:10:12
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Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions.

Keywords

thermoelectric power sensor --- wideband --- GaAs MMIC --- MEMS --- floating slug --- back cavity --- microwave measurement --- MEMS --- high temperature pressure sensors --- AlGaN/GaN circular HFETs --- GaN diaphragm --- adaptive control --- backstepping approach --- tracking performance --- microgyroscope --- resonant frequency --- resistance parameter --- micro fluidic --- oil detection --- MEMS --- microactuator --- magnetic --- micro-NIR spectrometer --- scanning grating mirror --- deflection position detector --- dual-mass MEMS gyroscope --- frequency tuning --- frequency split --- quadrature modulation signal --- frequency mismatch --- suspended micro hotplate --- single-layer SiO2 --- temperature uniformity --- power consumption --- infrared image --- MEMS (micro-electro-mechanical system) --- inertial switch --- acceleration switch --- threshold accuracy --- squeeze-film damping --- photonic crystal cavity --- photonic crystal nanobeam cavity --- optical sensor --- refractive index sensor --- nanoparticle sensor --- optomechanical sensor --- temperature sensor --- Accelerometer readout --- low noise --- low zero-g offset --- microfluidic --- femtosecond laser --- rapid fabrication --- glass welding --- bonding strength --- accelerometer design --- spring design --- analytical model --- gas sensor --- micropellistor --- microdroplet --- pulse inertia force --- methane --- tetramethylammonium hydroxide (TMAH) --- wet etching --- silicon --- 3D simulation --- level-set method --- single crystal silicon --- anisotropy --- vibrating ring gyroscope --- frequency split --- accelerometer --- tunnel magnetoresistive effect --- electrostatic force feedback --- n/a

Improving Practice and Performance in Basketball

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ISBN: 9783039216949 9783039216956 Year: Pages: 106 DOI: 10.3390/books978-3-03921-695-6 Language: English
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Sports Science
Added to DOAB on : 2019-12-09 11:49:16
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Despite being one of the most popular sports worldwide, basketball has received limited research attention compared to other team sports. Establishing a strong evidence base with high-quality and impactful research is essential in enhancing decision-making processes to optimize player performance for basketball professionals. Consequently, the book entitled Improving Performance and Practice in Basketball provides a collection of novel research studies to increase the available evidence on various topics with strong translation to practice in basketball. The book includes work by 40 researchers from 16 institutions or professional organizations from 9 countries. In keeping with notable topics in basketball research, the book contains 2 reviews focused on monitoring strategies to detect player fatigue and considerations for travel in National Basketball Association players. In addition, 8 applied studies are also included in the book, focused on workload monitoring, game-related statistics, and the measurement of physical and skill attributes in basketball players. This book also has a strong focus on increasing the evidence available for female basketball players, who have traditionally been under-represented in the literature. The outcomes generated from this book should provide new insights to inform practice in many areas for professionals working in various roles with basketball teams.

Wearable Wireless Devices

Authors: --- ---
ISBN: 9783039284429 9783039284436 Year: Pages: 176 DOI: 10.3390/books978-3-03928-443-6 Language: English
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2020-04-07 23:07:09
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With the growing interest in the use of technology in daily life, the potential for using wearable wireless devices across multiple segments, e.g., healthcare, sports, child monitoring, military, emergency, consumer electronics, etc., is rapidly increasing. Multibillion wearable sensors are predicted to be in use by 2025, with over 30% of them being new types of sensors that are only beginning to emerge. This book will focus on wireless wearable and implantable systems, flexible textile-based electronics, bio-electromagnetics, antennas and propagation, radio frequency (RF) circuits, sensors, security of wearables and implantable systems, nano-bio communication, and electromagnetic sensing

Development of CMOS-MEMS/NEMS Devices

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ISBN: 9783039210688 9783039210695 Year: Pages: 165 DOI: 10.3390/books978-3-03921-069-5 Language: English
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-06-26 08:44:07
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Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

Multi-Sensor Information Fusion

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ISBN: 9783039283026 9783039283033 Year: Pages: 602 DOI: 10.3390/books978-3-03928-303-3 Language: English
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2020-04-07 23:07:09
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This book includes papers from the section “Multisensor Information Fusion”, from Sensors between 2018 to 2019. It focuses on the latest research results of current multi-sensor fusion technologies and represents the latest research trends, including traditional information fusion technologies, estimation and filtering, and the latest research, artificial intelligence involving deep learning.

Keywords

linear regression --- covariance matrix --- data association --- sensor fusing --- SLAM --- multi-sensor data fusion --- conflicting evidence --- Dempster–Shafer evidence theory --- belief entropy --- similarity measure --- data classification --- fault diagnosis --- Bar-Shalom Campo --- Covariance Projection method --- data fusion --- distributed architecture --- Kalman filter --- linear constraints --- inconsistent data --- user experience evaluation --- user experience measurement --- eye-tracking --- facial expression --- galvanic skin response --- EEG --- interaction tracker --- self-reporting --- user experience platform --- mix-method approach --- image fusion --- multi-focus --- weight maps --- gradient domain --- fast guided filter. --- Dempster-Shafer evidence theory (DST) --- uncertainty measure --- open world --- closed world --- Deng entropy --- extended belief entropy --- sensor data fusion --- orthogonal redundant inertial measurement units --- data fusion architectures --- sensors bias --- fire source localization --- dynamic optimization --- global information --- the Range-Point-Range frame --- the Range-Range-Range frame --- sensor array --- SINS/DVL integrated navigation --- unscented information filter --- square root --- state probability approximation --- most suitable parameter form --- deep learning --- data preprocessing --- Human Activity Recognition (HAR) --- Internet of things (IoT) --- Industry 4.0 --- trajectory reconstruction --- low-cost sensors --- embedded systems --- powered two wheels (PTW) --- safe trajectory --- data fusion --- health management decision --- grey group decision-making --- health reliability degree --- maintenance decision --- sensor system --- least-squares filtering --- least-squares smoothing --- networked systems --- random parameter matrices --- random delays --- packet dropouts --- multi-sensor system --- multi-sensor information fusion --- particle swarm optimization --- sensor data fusion algorithm --- distributed intelligence system --- multi-sensor time series --- deep learning --- machine health monitoring --- time-distributed ConvLSTM model --- spatiotemporal feature learning --- optimal estimate --- unknown inputs --- distributed fusion --- augmented state Kalman filtering (ASKF) --- soft sensor --- coefficient of determination maximization strategy --- expectation maximization (EM) algorithm --- Gaussian mixture model (GMM) --- alumina concentration --- multi-sensor joint calibration --- high-dimensional fusion data (HFD) --- supervoxel --- Gaussian density peak clustering --- sematic segmentation --- multisensor data fusion --- multitarget tracking --- GMPHD --- sonar network --- RFS --- attitude estimation --- Kalman filter --- land vehicle --- magnetic angular rate and gravity (MARG) sensor --- quaternion --- yaw estimation --- network flow theory --- multitarget tracking --- spectral clustering --- A* search algorithm --- RTS smoother --- integer programming --- Surface measurement --- multi-sensor measurement --- surface modelling --- data fusion --- Gaussian process --- multi-sensor network --- observable degree analysis --- information fusion --- nonlinear system --- hybrid adaptive filtering --- weighted fusion estimation --- square-root cubature Kalman filter --- information filter --- surface quality control --- multi-sensor data fusion --- cutting forces --- vibration --- acoustic emission --- signal feature extraction methods --- predictive modeling techniques --- attitude --- orientation --- estimation --- Kalman filter --- quaternion --- manifold --- image registration --- evidential reasoning --- belief functions --- uncertainty --- DoS attack --- industrial cyber-physical system (ICPS) --- security zones --- mimicry security switch strategy --- fixed-point filter --- extended Kalman filter --- nested iterative method --- Steffensen’s iterative method --- convergence condition --- vehicular localization --- target positioning --- high-definition map --- vehicle-to-everything --- intelligent and connected vehicles --- intelligent transport system --- image registration --- non-rigid feature matching --- local structure descriptor --- Gaussian mixture model --- aircraft pilot --- workload --- multi-source data fusion --- fuzzy neural network --- principal component analysis --- parameter learning --- drift compensation --- domain adaption --- feature representations --- electronic nose --- data fusion --- dual gating --- MEMS accelerometer and gyroscope --- cardiac PET --- out-of-sequence --- multi-target tracking --- random finite set --- gaussian mixture probability hypothesis density --- multisensor system --- Gaussian process regression --- Bayesian reasoning method --- Dempster–Shafer evidence theory (DST) --- uncertainty measure --- novel belief entropy --- multi-sensor data fusion --- decision-level sensor fusion --- electronic nose --- subspace alignment --- interference suppression --- transfer --- evidence combination --- time-domain data fusion --- object classification --- uncertainty --- multirotor UAV --- precision landing --- artificial marker --- pose estimation --- sensor fusion --- camera --- LiDAR --- calibration --- plane matching --- ICP --- projection --- data fusion --- data registration --- adaptive distance function --- complex surface measurement --- Gaussian process model --- Dempster–Shafer evidence theory --- conflict measurement --- mutual support degree --- Hellinger distance --- Pignistic vector angle --- multi-sensor data fusion --- multi-environments --- state estimation --- unmanned aerial vehicle

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