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Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications

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Book Series: Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel ISSN: 18691765 ISBN: 9783731501220 Year: Volume: 13 Pages: XIII, 175 p. DOI: 10.5445/KSP/1000036875 Language: ENGLISH
Publisher: KIT Scientific Publishing
Subject: Technology (General)
Added to DOAB on : 2019-07-30 20:01:57
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Abstract

Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.

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