TY - BOOK ID - 42468 TI - Optical MEMS AU - Xie, Huikai AU - Zamkotsian, Frederic PY - 2019 SN - 9783039213030 9783039213047 DB - DOAB KW - scanning micromirror KW - electromagnetic actuator KW - angle sensor KW - flame retardant 4 (FR4) KW - variable optical attenuator (VOA) KW - wavelength dependent loss (WDL) KW - polarization dependent loss (PDL) KW - micro-electro-mechanical systems (MEMS) KW - tunable fiber laser KW - echelle grating KW - DMD chip KW - MEMS scanning micromirror KW - fringe projection KW - laser stripe scanning KW - quality map KW - large reflection variations KW - 3D measurement KW - laser stripe width KW - vibration noise KW - MLSSP KW - MEMS scanning mirror KW - wavefront sensing KW - digital micromirror device KW - ocular aberrations KW - dual-mode liquid-crystal (LC) device KW - infrared Fabry–Perot (FP) filtering KW - LC micro-lenses controlled electrically KW - spectrometer KW - infrared KW - digital micromirror device (DMD) KW - signal-to-noise ratio (SNR) KW - stray light KW - programmable spectral filter KW - digital micromirror device KW - optical switch KW - microscanner KW - input shaping KW - open-loop control KW - quasistatic actuation KW - residual oscillation KW - usable scan range KW - higher-order modes KW - resonant MEMS scanner KW - electrostatic KW - parametric resonance KW - NIR fluorescence KW - intraoperative microscope KW - 2D Lissajous KW - fluorescence confocal KW - metasurface KW - metalens KW - field of view (FOV) KW - achromatic KW - Huygens’ metalens KW - bio-optical imaging KW - optical coherence tomography KW - confocal KW - two-photon KW - spectrometer KW - MEMS mirror KW - electrothermal bimorph KW - Cu/W bimorph KW - electrothermal actuation KW - reliability KW - n/a UR - https://www.doabooks.org/doab?func=search&query=rid:42468 AB - Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense. ER -