TY - BOOK ID - 34295 TI - Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications AU - Meckbach, Johannes Maximilian PY - 2013 SN - 9783731501220 DB - DOAB KW - Superconductor, Josephson, Quantum, Multilayer, Cryogenics UR - https://www.doabooks.org/doab?func=search&query=rid:34295 AB - Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail. ER -